Ion milling device

ABSTRACT

An ion milling device of the present invention is provided with a tilt stage ( 8 ) which is disposed in a vacuum chamber ( 15 ) and has a tilt axis parallel to a first axis orthogonal to an ion beam, a drive mechanism ( 9, 51 ) which has a rotation axis and a tilt axis parallel to a second axis orthogonal to the first axis and rotates or tilts a sample ( 3 ), and a switching unit which enables switching between a state in which the ion beam is applied while the sample is rotated or swung while the tilt stage is tilted, and a state in which the ion beams is applied while the tilt stage is brought into an untilted state and the sample is swung. Consequently, the ion milling device capable of performing cross-section processing and flat processing of the sample in the same vacuum chamber is implemented.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a continuation of U.S. patent application Ser. No.15/011,980 filed on Feb. 1, 2016 and to U.S. patent application Ser. No.13/883,539 filed on May 3, 2013 which claims priority toPCT/JP2011/075306 filed on Nov. 2, 2011 and claims priority under 35U.S.C. § 119 of Japanese Patent Application No. 2010-248022, filed onNov. 5, 2010, the entire content of which are herein incorporated byreference.

TECHNICAL FIELD

The present invention relates to an ion milling device and an ionmilling method for fabricating a sample to be observed by using ascanning electron microscope (SEM), a transmission electron microscope(TEM), or the like.

BACKGROUND ART

An ion milling device is a device for polishing a surface or crosssection of a metal, glass, ceramic, or the like by irradiating thesurface or cross section with an argon ion beam, and is favorable as apre-processing device for observation of a surface or cross section of asample using an electron microscope.

In the conventional cross-sectional observation of a sample using anelectron microscope, a vicinity of a part to be observed is first cut byusing a diamond cutter, a jigsaw, or the like, for example. Then, afterthe cut surface is mechanically polished, the sample is placed on asample table for an electron microscope and the image of the cut surfaceis observed.

The mechanical polishing has a problem that, when a soft sample such asof a polymer material or aluminum is polished, the surface to beobserved is crushed or deeply scratched by particles of an abrasivecompound. Moreover, the mechanical polishing also has problems that itis difficult to polish a hard sample such as of glass or a ceramic andthat it is extremely difficult to perform cross-section processing on acomposite material in which a soft material and a hard material arestacked.

On the other hand, ion milling has advantageous effects of being capableof processing a soft sample without crushing the profile of the surface,of being capable of polishing a hard sample and a composite material,and of being capable of easily obtaining a cross section in a mirrorstate.

Patent Literature 1 describes a sample fabricating device including: ionbeam irradiating means, disposed in a vacuum chamber, for irradiating asample with an ion beam; a tilt stage disposed in the vacuum chamber andhaving a tilt axis in a direction substantially perpendicular to the ionbeam; a sample holder, disposed on the tilt stage, for holding thesample; and a shielding member, located on the tilt stage, for blockingpart of the ion beam for irradiating the sample, the sample fabricatingdevice being configured to process a sample with the ion beam whilechanging a tilt angle of the tilt stage.

CITATION LIST Patent Literature Patent Literature 1: JP-A-2005-91094SUMMARY OF INVENTION Technical Problem

The sample fabricating device disclosed in Patent Literature 1 is an ionmilling device for cross-section processing (cross-section milling).Meanwhile, there is an ion milling device for flat surface milling,which processes a surface of a sample with an ion beam while rotatingthe sample. Although processing a sample by irradiating the sample withan ion beam in a similar manner as described above, these devices needto be used separately because of their different movements of a sampleat the time of irradiation with an ion beam.

Hereinafter, an ion milling device intended to perform bothcross-section processing and flat surface processing in the same vacuumchamber will be described.

Solution to Problem

As an aspect for achieving the above-described object, there is proposedan ion milling device including: an ion source for irradiating a samplewith an ion beam; and a tilt stage disposed inside a vacuum chamber andhaving a tilt axis parallel with a first axis orthogonal to the ionbeam, in which the ion milling device includes a support table, disposedon the tilt stage, for supporting a sample holding member for holdingthe sample; a drive mechanism for rotating or tilting the support table,the drive mechanism having a rotation axis and a tilt axis which areparallel with a second axis orthogonal to the first axis; and aswitching unit for switching a state of the ion milling device between astate where the ion beam is irradiated while the tilt stage is tiltedand the support table is rotated or swung and a state where the ion beamis irradiated while the tilt stage is not tilted and the support tableis swung.

Advantageous Effect of Invention

According to the above-described configuration, it is possible toperform both of the cross-section milling and the flat surface millingwith a single device.

Other objects, characteristics, and advantages of the present inventionwill be clarified from the following description of embodiments of thepresent invention regarding the attached drawings.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is a schematic configuration view of an ion milling device.

FIG. 2 is a schematic configuration view of a sample-mask unit.

FIG. 3 is a view showing another example of the sample-mask unit.

FIG. 4 is an explanatory view showing a method of placing a crosssection of a sample and a mask in parallel with each other.

FIG. 5 is a view showing a state where the sample unit base is pulledout and a sample-mask-unit slightly moving mechanism on which thesample-mask unit is placed has been detached.

FIG. 6 is a view showing how a sample-mask-unit slightly movingmechanism on which a sample-mask unit is placed is mounted on aseparately provided optical microscope.

FIG. 7 a view showing a state where the sample-mask-unit slightly movingmechanism on which the sample-mask unit is placed is mounted on theoptical microscope.

FIG. 8 is an explanatory view showing a method of aligning the center ofan argon ion beam and a portion of the sample to be subjected tocross-section polishing.

FIG. 9 is an explanatory view showing a method of polishing a crosssection of a sample by ion milling.

FIG. 10 is a schematic configuration view of the ion milling device.

FIG. 11 is a configuration view of the sample-mask-unit slightly movingmechanism on which the sample-mask unit is placed and the sample unitbase.

FIG. 12 is a configuration view of the sample-mask-unit slightly movingmechanism on which the sample-mask unit is placed and a sample unit baseusing a shaft coupling.

FIG. 13 is a view showing how the sample-mask-unit slightly movingmechanism on which the sample-mask unit is placed is mounted on aseparately provided optical microscope.

FIG. 14 is a configuration view of a rotating and tilting mechanism anda center displacing mechanism.

FIG. 15 is a configuration view of a rotating and tilting mechanism anda center displacing mechanism (using a shaft coupling).

FIG. 16 is a configuration view of a sample surface unit and the sampleunit base.

FIG. 17 is a schematic configuration view of an ion milling device onwhich an optical microscope is mounted.

FIG. 18 is a schematic configuration view of the ion milling device onwhich an electron microscope is mounted.

FIG. 19 is a view for explaining a relation between a line of the ionbeam and the rotation tilt axis of the rotating and tilting mechanismduring the cross-section milling.

FIG. 20 is a view for explaining a relation between a line of the ionbeam and the rotation tilt axis of the rotating and tilting mechanismduring the flat surface milling.

FIG. 21 is a view showing an overview of an operation panel of the ionmilling device.

FIG. 22 is a view for explaining an overview of a control device of theion milling device.

FIG. 23 is a flowchart showing a procedure of setting a processing modeand processing condition.

DESCRIPTION OF EMBODIMENTS

In a cross-section milling device (device for forming a smooth surfacein a sample by milling the sample via a mask), a sample stage and a unitfor holding a sample are placed on the same rotation tilt axis (whichmeans they have the same movement). For this reason, a processingobservation window is placed on the same axial direction as that of thesample stage. Accordingly, when the sample stage is located on a frontsurface of the device, the processing observation window is located onthe front surface or a rear surface of the device, which makes itdifficult to place and operate an observation device (microscope). Inaddition, flat surface milling (which smoothly flattens a surfaceperpendicular to an axis of an ion beam (which means the tilt angle ofthe sample stage is 90 degrees)) cannot be enabled by only replacing arotating and tilting mechanism of the cross-section milling device witha rotating mechanism; accordingly milling devices respectively forcross-section and flat surface milling are required.

In this embodiment, description will be given of an ion milling devicecharacterized in that it facilitates observation of an observationsurface processed mainly by milling and further of performing both ofthe cross-section milling and the flat surface milling.

In this embodiment, as an example of the ion milling device, descriptionwill be given of an ion milling device including: an ion beam source,attached to a vacuum chamber, for irradiating a sample with an ion beam;a sample-mask unit including a sample holder for fixing the sample, amask (shielding part) for shielding part of the sample fixed to thesample holder, a sample rotating mechanism for rotating the sampleholder, and a mask position adjusting unit for adjusting a shieldingpositional relation between the mask and the sample; a sample-mask-unitslightly moving mechanism capable of driving the sample-mask unit in theX-axis and Y-axis directions perpendicular to the ion beam; a sampleunit base capable of placing the sample-mask-unit slightly movingmechanism in the vacuum chamber; and an optical microscope for observingthe shielding positional relation between the mask and the sample,characterized in that a fixation part of the sample-mask unit or thesample-mask-unit slightly moving mechanism to be fixed to the sampleunit base is a rear portion of the sample-mask unit or thesample-mask-unit slightly moving mechanism, a rotation part is providedon the sample unit base, the sample stage, the ion beam source, and theprocessing observation window are mounted respectively on a frontsurface, a right or left side surface, and an upper surface of thevacuum chamber, and a shutter is provided between the sample and theprocessing observation window.

In addition, description will be given of the ion milling devicecharacterized in that the rotating and tilting mechanism for the sampleincludes a rotating function, the ion milling device includes a tiltingmechanism having a tilt axis in a direction perpendicular to a rotationaxis of the sample, and a center displacing mechanism for the axis ofthe ion beam and the rotation axis of the sample (in the case where thetilt angle of the stage is 90 degrees) is provided.

The above-described configuration facilitates the observation of anobservation surface processed by milling and makes it possible toperform both of the cross-section milling and the flat surface milling.

Hereinafter, the embodiment will be described on the basis of thedrawings.

This embodiment will be described by giving as an example an ion millingdevice equipped with an ion source for irradiation with an argon ionbeam. However, the ion beam is not limited to the argon ion beam andvarious types of ion beams are applicable.

FIG. 1 shows a configuration of the ion milling device. An ion source 1and a sample stage 8 are provided on an upper surface and a frontsurface of a vacuum chamber 15, respectively.

A sample-mask-unit slightly moving mechanism 4 is mounted on a sampleunit base 5. The mounting method is to cause a lower surface (on theopposite side to a mask surface to be irradiated with the ion beam) ofthe sample-mask-unit slightly moving mechanism 4 and an upper surface ofthe sample unit base 5 to come into contact with each other, and bescrewed. The sample unit base 5 is configured to be rotatable andtiltable at any angle to the optical axis of the ion beam. The directionand tilt angle of the rotation and tilt of the sample unit base 5 iscontrolled by the sample stage 8. Rotating and tilting the sample stage8 allows a sample 3 placed on the sample-mask-unit slightly movingmechanism 4 to be set at a predetermined angle to the optical axis ofthe ion beam. Moreover, the rotation tilt axis of the sample stage 8 andthe upper surface of the sample (lower surface of the mask) arepositioned at the same level, thereby forming an efficient and smoothprocessing plane. In addition, the sample-mask-unit slightly movingmechanism 4 is configured to be movable to the front, rear, left, andright in directions perpendicular to the optical axis of the ion beam,that is, in the X direction and the Y direction.

The sample unit base 5 is disposed via the sample stage 8 (rotatingmechanism) mounted on a flange 10 serving part of a container wall ofthe vacuum chamber 15. The sample unit base 5 is configured to be pulledout of the vacuum chamber when the vacuum chamber 15 is opened into anatmospheric state by pulling out the flange 10 along a linear guide 11.In this way, a sample-stage pulling out mechanism is configured.

A main body of a sample-mask unit 21 will be described on the basis ofFIG. 2. Part (a) and Part (b) of FIG. 2 are a plan view and a side view,respectively. In the embodiment, a main body configured integrally of atleast a sample holder 23, the rotating mechanism for the sample holder23, a mask 2, and a finely adjusting mechanism for the mask 2 isreferred to as the sample-mask unit (main body) 21. In FIG. 2, asample-holder rotary ring 22 and a sample-holder rotary screw 28 areincluded as the rotating mechanism for the sample holder 23, so that thesample holder is rotatable vertically with respect to the optical axisof the ion beam. The sample-holder rotary ring 22 is configured to berotated by rotating the sample-holder rotary screw 28, and to bereversely rotated back by a spring pressure of a spring 29.

The sample-mask unit 21 has a mechanism capable of finely adjusting theposition and rotation angle of the mask, and is attachable to anddetachable from the sample-mask-unit slightly moving mechanism 4. Inthis embodiment, the sample-mask unit 21 and the sample-mask-unitslightly moving mechanism 4 are two components, but may be configured asa single component (In the embodiment, the sample-mask unit and thesample-mask-unit slightly moving mechanism are described separately forthe sake of understanding).

The mask 2 is fixed to a mask holder 25 with a mask fixing screw 27. Themask holder 25 is moved along a linear guide 24 by operating a maskfinely adjusting mechanism (that is, a mask position adjusting unit) 26,so that the positions of the sample 3 and the mask 2 are finelyadjusted. The sample holder 23 is inserted into and fixed to thesample-holder rotary ring 22 from a lower side. The sample 3 is bondedand fixed to the sample holder 23. The position of the sample holder 23in a height direction is adjusted with a sample-holder-positioncontrolling mechanism 30, thereby bring the sample holder 23 into closecontact with the mask 2.

FIG. 3 shows another example of the sample-mask unit 21. This exampleuses a sample-holder fixing metal fitting 35 and the otherconfigurations are basically the same as those of the example shown inFIG. 2. Part (a) of FIG. 3 shows a state where the sample holder 23 towhich the sample 3 is fixed is mounted in the sample-mask unit 21 whilePart (b) of FIG. 3 shows a state where the sample holder 23 to which thesample 3 is fixed is removed out of the sample-mask unit 21.

FIG. 4 is an explanatory view showing a method of placing a crosssection of the sample and the mask in parallel with each other. Thesample-holder rotary screw 28 is rotated to perform position adjustmentin an X1 direction, followed by performing fine adjustment under themicroscope as described later to place the cross section of the sample 3and the ridge line of the mask 2 in parallel with each other. In thisevent, the setting is performed by rotating the mask finely adjustingmechanism 26 such that the cross section of the sample 3 slightlyprotrudes, for example protrudes by approximately 50 μm, from the mask.

FIG. 5 shows a configuration of a sample-stage pulling out mechanism 60.The sample-stage pulling out mechanism 60 includes the linear guide 11and the flange 10 fixedly attached to the linear guide 11. The sampleunit base 5 fixedly attached to the sample stage mounted on the flange10 is pulled out of the vacuum chamber 15 along the linear guide 11. Inconjunction with this operation, the sample-mask-unit slightly movingmechanism 4 with the sample-mask unit 21 is placed is placed on thesample unit base 5, in other words, the mask 2, the sample holder 23,and the sample 3 are integrally pulled out of the vacuum chamber 15.

In the embodiment, the sample-mask-unit slightly moving mechanism 4, onwhich the sample-mask unit 21 is placed, has such a configuration as tobe detachably fixed to the sample unit base 5. Accordingly, once thesample-mask-unit slightly moving mechanism 4, on which the sample-maskunit 21 is placed, is pulled out of the vacuum chamber 15, thesample-mask-unit slightly moving mechanism 4, on which the sample-maskunit 21 is placed, is made detachable from the sample unit base 5(detachment standby of the sample-mask unit 21).

FIG. 5 shows a state where the sample-mask-unit slightly movingmechanism 4, on which the sample-mask unit 21 is placed, has beendetached from such a detachable state. This detachment is performedmanually or with an appropriate tool.

On the other hand, an optical microscope 40 for observing the shieldingpositional relation between the mask 2 and the sample 3 is configured asa separate body from the vacuum chamber 15 as shown in FIG. 6, and canbe disposed at any position. In addition, the optical microscope 40includes a known magnifying lens 12 and a magnifying-lens slightlymoving mechanism 13. Further, the optical microscope 40 is provided witha fixation table 42 on an observation table 41 such that the detachedsample-mask-unit slightly moving mechanism 4, on which the sample-maskunit 21 is placed, can be placed on the fixation table 42. Thesample-mask-unit slightly moving mechanism 4, on which the sample-maskunit 21 is placed, is placed on the fixation table 42 at a determinedposition that is reproducible by shafts and holes for positioning.

FIG. 7 shows a state where the sample-mask-unit slightly movingmechanism 4, on which the sample-mask unit 21 is placed, is fixed on thefixation table 42.

FIG. 8 is an explanatory view showing a method of aligning a portion ofthe sample 3 desired to be subjected to cross-sectional polishing withthe center of the ion beam. A mark formed by irradiation with the ionbeam with a photosensitive paper or the like being attached to thesample holder 23, that is, the center of the beam and the center of themagnifying lens are aligned with each other by driving the magnifyinglens in the X2 and Y2 directions by the magnifying-lens slightly movingmechanism 13. The sample-mask-unit slightly moving mechanism 4, on whichthe sample-mask unit main body 21 loaded with the sample 3 as shown inFIG. 3 is placed, is placed on the fixation table 42. The position ofthe fixation table 42 in the X3 and Y3 directions is adjusted to bealigned with the center of the magnifying lens, thereby aligning thecenter of the ion beam with the portion desired to be subjected tocross-sectional polishing.

As described above, when the shielding positional relation between themask 2 and the sample 3 is adjusted, the sample-mask-unit slightlymoving mechanism 4, on which the sample-mask unit 21 is placed, isdetached from the sample unit base 5 and mounted on the fixation table42 of the optical microscope 40, and the shielding positional relationof the mask 2 relative to the sample 3 is adjusted by the mask positionadjusting unit (mask finely adjusting mechanism).

FIG. 9 is an explanatory view showing a method of mirror-polishing thecross section of the sample 3 with the ion beam. Irradiating the sample3 with an argon ion beam can remove a portion of the sample 3 notcovered with the mask 2 along the mask 2 in a depth direction and canmirror-polish the surface of the cross section of the sample 3.

In this way, the sample-mask-unit slightly moving mechanism 4, on whichthe sample-mask unit 21 including the mask 2 having the adjustedshielding positional relation relative to the sample is placed, isreturned to and mounted on the sample unit base 5 at the time of the ionmilling.

As described above, an ion milling method is configured, in which at thetime of adjusting the shielding positional relation between the mask 2and the sample 3, the sample-mask-unit slightly moving mechanism 4 onwhich the sample-mask unit 21 is placed is removed from the sample unitbase 5 and mounted on the fixation table 42 of the optical microscope 40and the shielding positional relation of the mask relative to the sample3 is adjusted, and at the time of ion milling, the sample-mask-unitslightly moving mechanism 4, on which the sample-mask unit 21 includingthe mask 2 having the adjusted shielding positional relation relative tothe sample is placed, is returned into the vacuum chamber 15 and mountedon the sample unit base 5.

The ion milling device as illustrated in FIG. 1 can perform thecross-section milling processing but cannot perform the flat surfacemilling processing. For this reason, in this embodiment, an ion millingdevice capable of both types of processing will be described.

FIG. 10 shows a configuration of an ion milling device that can performboth of the cross-section milling processing and the flat surfacemilling processing. A processing observation window 7, an ion source,and a sample stage are mounted respectively on an upper surface, a leftside surface (may alternatively be a right side surface), and a frontsurface of a vacuum chamber 15, and a shutter 101 is provided between asample and the processing observation window 7. The shutter 101 isprovided to prevent sputtered particles from being deposited on theprocessing observation window 7. The vacuum chamber 15 generally has abox shape forming a space to form a vacuum atmosphere or a shape similarto the box shape. The observation window is provided above the box (in adirection opposite to that in which the gravitational field is directedin an environment with gravity) while the ion source is provided on aside wall surface of the box (a surface adjacent to the upper surface ofthe box and in a direction perpendicular to the direction in which thegravitational field is directed). In other words, the processingobservation window is provided on the wall surface of the vacuum chamberin a direction orthogonal to a plane including the tilt axis of thesample stage and the irradiation path of the ion beam. Note that anoptical microscope or an electron microscope may be provided in anopening for the processing observation window instead of providing awindow capable of being vacuum-sealed, as will be described later.

The sample unit base 5 is provided with a rotor 9 on which a sampleholding member (member for holding a sample including thesample-mask-unit slightly moving mechanism 4) can be mounted. The rotor9 functions as a support table for supporting the sample holding member.As shown in FIG. 11, the sample unit base 5 is formed of the rotor 9,gears 50, and bearings 51. As shown in FIG. 11, the sample-mask-unitslightly moving mechanism 4 has a mask unit fixation part (including ascrew) 52 provided on a rear surface of the sample-mask-unit slightlymoving mechanism 4. A method of mounting the sample-mask-unit slightlymoving mechanism 4 onto the sample unit base 5 is to cause a fixationsurface (rear surface) of the sample-mask-unit slightly moving mechanism4 and an upper surface of the rotor 9 of the sample unit base 5 to comeinto contact with each other, and be screwed by using the mask unitfixation part 52. The sample unit base 5 is not rotated or tilted, andconfigured such that the rotor 9 mounted on the sample unit base 5enables rotation and tilt at any angle to the optical axis of the ionbeam irradiated from the side surface of the vacuum chamber 15. Thedirection and tilt angle of the rotation and tilt are controlled by thesample stage 8.

Here, the method of rotating and tilting the rotor 9 of the sample unitbase 5 may be either one shown in FIG. 11 or one (using a shaft coupling53 shown in FIG. 12. Rotating and tilting the rotor 9 of the sample unitbase 5 can set the sample 3 placed on the sample-mask-unit slightlymoving mechanism 4 at a predetermined angle to the optical axis of theion beam. Further, the rotation axis of the rotor 9 of the sample unitbase 5 and the upper surface of the sample (the lower surface of themask) are positioned at the same level, thereby forming an efficient andsmooth processing plane. In addition, the sample-mask-unit slightlymoving mechanism 4 is configured to be movable to the front, rear, left,and right in a direction perpendicular to the optical axis of the ionbeam, that is, in the X direction and the Y direction.

The placement onto the optical microscope 40, which is a separate bodyfrom the device, may be achieved by a method using a lower surface ofthe sample-mask-unit slightly moving mechanism 4, instead of using themask unit fixation part 52 of the sample-mask unit 21 or thesample-mask-unit slightly moving mechanism 4, which is used for theplacement onto the sample unit base 5 as shown in FIG. 13.

The point different from the example of FIG. 6 is that themagnifying-lens slightly moving mechanism 13 for adjusting the center ofthe beam and the center of the magnifying lens is implemented on thefixation table 42 side. Either of this example or the example of FIG. 6may be employed for the magnifying-lens slightly moving mechanism 13.The other operations are performed in the same manner as those of FIG.6.

In the ion milling device illustrated in FIG. 10, the rotating andtilting mechanism for the sample is provided with a rotating functionwhile a tilting mechanism having a rotation tilt axis perpendicular tothe axis of the ion beam is provided, as illustrated in FIG. 14.Further, a center displacing mechanism is provided for displacing theaxis of the ion beam and the rotation axis of the sample-mask-unitslightly moving mechanism 4 from each other when the tilt angle is setat 90 degrees as shown in FIG. 14. Here, as shown in FIG. 15, a systemusing a shaft coupling may be employed. However, the shaft coupling,when used, needs to be placed in the rotating and tilting unit as shownin FIG. 15 while the center displacing mechanism needs to be placed in alower portion of the rotor of the sample unit base 5. Having thefunction of rotating a sample and being configured to determine theincident angle and the amount of displacement of the center of the ionbeam as shown in FIG. 14 and FIG. 15, the ion milling device is capableof also performing flat surface milling (smoothly processing a surfaceperpendicular to the axis of the ion beam (when the tilt angle of thesample stage is 90 degrees) while being the cross-section milling(device forming a smooth surface by milling a sample via a mask).

Note that since the distance between the ion source and the sample needsto be changed depending on the performance of the ion source for thecross-section milling and the flat surface milling, a mechanism capableof moving the ion source or the sample stage in the direction of theaxis of the ion beam is provided. Therefore, the distance between theion source and the sample is determined depending on the ion source wheneach of the cross-section milling and the flat surface milling isperformed. For this reason, the device has a function of switching itsmode between the cross-section milling mode and the flat surface millingmode (for example, rotation and tilt or rotation) by recognizing thecross-section milling or the flat surface milling from the position ofthe sample stage loaded with the sample or the position of the ionsource.

Here, the reason why two different types of processing are made possiblewill be described further in detail. Hereinafter, the principle thatenables the device illustrated in the embodiment to perform both of thecross-section milling processing and the flat surface milling processingwill be described in detail. FIG. 19 is a view showing a relationbetween the irradiation direction of the ion beam and the rotation axisor tilt axis (hereinafter, simply referred to as the rotation axis) ofeach rotating mechanism or tilting mechanism (hereinafter, simplyreferred to as the rotating mechanism) in the cross-section milling.FIG. 20 is a view showing a relation between the irradiation directionof the ion beam and each rotation axis in the flat surface milling.

In FIG. 19, an axis 1901 represented by a dashed line is parallel withan axis represented by an alternate long and short dashed line in adiagram on the upper side of FIG. 10, and is also parallel with therotation axis of the rotor 9 illustrated in FIG. 11, for example.Further, an axis 1902 represented by an alternate long and two shortdashes line is parallel with the rotation axis of the sample stage 8.Moreover, an axis 1903 represented by an alternate long and short dashedline indicates the irradiation direction of the ion beam emitted fromthe ion source 1. In addition, the axis 1901 is parallel with a surface,irradiated with the ion beam, of the mask 2.

In addition, the axes 1901, 1902, and 1903 are orthogonal to oneanother. In the case of this example, the axis 1901, the axis 1902, andthe axis 1903 are arranged in parallel with the z-axis, the y-axis, andthe x-axis, respectively.

In the cross-section milling, a swing drive with the rotation axisparallel with the axis 1901 being set as a rotation center is performedso that a line should not be formed along the path of the ion beam onthe cross section of the sample 3. At this time, the mask surface isparallel with the axis 1901. On the other hand, in the flat surfacemilling, as illustrated in FIG. 20, the sample 1904 is driven to tilt ata predetermined angle or swing within a predetermined angle range by thesample stage 8, and the sample 1904 is rotated about an axis parallelwith a tilt axis 1905 of the axis 1901 set as the rotation axis.

As described above, the device of this embodiment is capable of rotationdrive, or rotation drive about the tilt, or swing drive of a secondrotation axis (the axis 1901 or the axis 1905 (including the case ofperforming swing operation) on the sample stage having a first rotationaxis (axis parallel with the axis 1902). Specifically, the deviceillustrated in FIG. 10 is characterized in that the device performs theswing drive for the cross-section milling and the rotation or swingdrive of the sample for the flat surface milling by using the rotatingmechanism mounted on the sample stage 8 and performs the tilt for theflat surface milling by using the rotating mechanism which tilts thesample stage 8 itself. Note that the axis 1905 indicates the center ofrotation of the drive mechanism in FIG. 20, but in the flat surfacemilling, rotation is performed with the center of the sample beingdisplaced from the axis 1905 in order to perform the flat surfaceprocessing on a wide region of the sample.

FIG. 21 is a view showing an example of an operation panel for switchingthe mode between the cross-section milling processing and the flatsurface milling processing and for setting the operation conditions ofthe stage and the like. On a processing mode setting part 2101, buttonsfor selecting the flat surface milling (Flat) or the cross-sectionmilling (Cross-section) are disposed, enabling alternative selection ofeither one of them. In addition, on a stage operation conditions settingpart 2102, buttons for selecting tilt operation (Tilt) or swingoperation (Swing) are disposed, enabling alternative selection of eitherone of them. The stage operation conditions setting part 2102 is furtherprovided with setting parts for setting the tilt angle or the anglerange of the swing operation (Angle) and the periodic speed (Speed) inthe case of the swing operation. Further, a rotating table operationconditions setting part 2103 is provided with setting parts for settingthe swing angle (Angle) and the periodic speed (Speed) of the swingoperation by the rotating table.

In the operation panel illustrated in FIG. 21, selection of an inputwindow is enabled by a select key (Select) and selection of a numericalvalue is enabled by “Up” and “Down” buttons, for the setting partsrequiring input of a numerical value. Further, an enter key (Enter)allows a numerical value thus selected to be registered. The stagereferred to here is, for example, the sample stage 8 in FIG. 10 whilethe rotating table referred to here is, for example, the rotor 9 in FIG.11.

The cross-section milling processing requires the swing drive of therotating table, but does not require the swing drive of the samplestage. For this reason, a control device of the milling device ispreferably configured such that selecting the cross-section millingprocessing (selecting the Cross-section button) prohibits or invalidatessetting in the stage operation conditions setting part 2102. On theother hand, tilting the sample stage 8 at the time of the cross-sectionmilling may cause a portion irrelevant to the processing target to beirradiated with the ion beam or may cause the cross section of thesample to be processed obliquely. For this reason, with thecross-section milling processing being selected, if the sample stage 8is in a tilt state, irradiation with the ion beam may be controlled tobe not allowed or an error message may be generated to warn theoperator. Alternatively, such a control that the tilt angle of thesample stage 8 is automatically set at zero may be employed.

On the other hand, the flat surface milling processing uses both of thetilting of the sample stage 8 and the rotation or swing of the rotatingtable, and thus, inputs of both of the stage operation conditionssetting part 2102 and the rotating table operation conditions settingpart 2103 need to be validated.

In the device of the embodiment, the rotor 9 is caused to perform bothof the swing drive in the cross-section milling and the rotation drivein the flat surface milling, thereby making it possible to perform twodifferent types of milling processing with the single milling device.

Note that, in the device illustrated in FIG. 10, the ion source 1 isdisposed on a lateral side of the vacuum chamber 15. This is becausethis configuration makes it possible to stabilize the stage when thetilt stage is not tilted (for example, in the cross-section milling).Performing the cross-section processing with the tilt stage being nottilted requires irradiation with the ion beam from a lateral side, andaccordingly, the ion source 1 is disposed on the lateral side of thevacuum chamber 15. In addition, in conjunction with this configuration,the processing observation window for checking the processed crosssection is placed on the upper side of the vacuum chamber 15. Suchconfiguration makes it possible to check the processed cross section inthe cross-section milling and to check the processed surface in the flatsurface milling through the single observation window.

FIG. 22 is a view showing an example of a control device of the ionmilling device illustrated in FIG. 10. A switching unit 2201 correspondsto the operation panel of FIG. 21, and information on selection made inthe switching unit 2201 is transmitted to a calculating unit 2207 via aninput interface 2205 provided in a control device 2202. In thecalculating unit 2207, a control signal generating unit 2209 reads out acontrol signal from a control signal storing unit 2208 on the basis ofan input signal, and transmits the control signal to an output interface2206. Drive mechanisms 2203, 2204 perform drive under conditionsselected in the switching unit 2201, on the basis of the receivedcontrol signal.

The drive mechanism 2203 is a drive mechanism for driving the tilt stageand the drive mechanism 2204 is a drive mechanism for driving therotating table mounted on the tilt stage. Note that, although in thisembodiment, selection of which one of the cross-section millingprocessing and the flat surface milling processing is performed is madeby selecting the processing mode in the switching unit 2201, the presentinvention is not limited to this configuration. For example, a sensorfor recognizing the shape of the sample stage may be provided toautomatically select the processing mode. In this case, the sensor and acalculating device for recognizing the sensor information correspond tothe switching unit.

In addition, the device may be configured such that the selection of theprocessing mode in the switching unit and the state of the device arecompared, and if the selection or the state of the device is notappropriate, an error message is generated to warn the operator not toperform processing based on the erroneous conditions.

FIG. 23 is a flowchart showing a determination procedure of comparingthe processing mode and the state of the device and of generating amessage for leading the operator to perform correct device settings.First, the processing mode is selected on the operation panel as shownin FIG. 21 while the power of the device is on (Step 2301). Then, thecontrol signal generating unit 2209 of the calculating unit 2207determines which processing mode is selected (Step 2302), and determineswhether or not a sample holder suitable for the processing mode has beenplaced on the sample stage (the determination is made at Step 2303 whenthe cross-section processing is selected or at Step 2304 when the flatsurface processing is selected).

The determination on whether or not a predetermined sample holder hasbeen placed is implemented by including in the vacuum chamber a sensor(sensor unit 2210) for determining the difference between the sampleholders and whether or not the sample holder has been placed. When thesensor generates a signal indicating that the sample holder itself hasnot been placed or indicating that a sample holder unsuitable for theset processing mode has been placed, a device state monitoring unit 2211incorporated in the calculating unit 2207 transmits a predeterminedsignal to a display unit 2212, which thus generates an error message(Step 2305). The error message may be made as “Err” displayed on thedisplay unit of the operation panel illustrated in FIG. 21, or may bedisplayed by using another display means or warning generator.

Next, when the cross-section milling is selected at Step 2302, it isdetermined whether or not the tilt angle of the sample stage 8 is zero(Step 2306). When the tilt angle is not zero, an error message isgenerated. The generation of such message makes it possible to noticethat the state of the stage is not appropriately set for thecross-section milling and thus suppresses the possibility of performingerroneous processing. After the tilt angle of the stage is confirmed tobe appropriately set at Step 2307, the determination procedure proceedsto a state enabling the conditions for the swing drive of the rotatingtable to be inputted (Step 2307).

On the other hand, when the flat surface milling is selected at Step2302, the determination process proceeds to a state enabling theconditions for both of the tilt stage and the rotating stage to be set(Step 2308) because of the necessity to drive both stages.

After the above-described procedure, it is further determined whether ornot the other conditions to be set (current of the ion beam, processingtime, and the like) are set (Step 2309), and the processing is started(Step 2310).

Performing the processing after the above-described procedure eliminatesoccurrence of wrong selection in the device capable of performing twotypes of processing, and allows easy setting of the processingconditions. Moreover, when the stage is tilted (if the tilt angle is not0°) at Step 2306, the tilt stage may be controlled to fall automaticallyinto a non-tilt state.

As described above, finding the setting information of the processingmode, the type of the mounted holder, and the state of the device aswell as comparing these pieces of information makes it possible toeasily determine whether or not the current setting state isappropriate, and to thus prevent processing based on erroneous settingsfrom occurring.

In addition, as described above, the distance between the ion source andthe sample needs to be changed depending on the performance of the ionsource for the cross-section milling and the flat surface milling. Forthis reason, the device may be configured such that the processing modeis automatically switched depending on the setting of the position ofthe sample stage. Moreover, the device may be configured such that anerror message is generated when the setting of the position of thesample stage and the selection of the processing mode conflict with eachother. In this case as well, performing the setting after the procedureas illustrated in FIG. 23 makes it possible to prevent erroneoussettings. Further, the device may be provided with a control mechanismthat automatically controls the position of the sample stage dependingon the selection of the processing mode.

Since the sample-mask-unit slightly moving mechanism 4 on which thesample-mask unit 21 is mounted is detachable from the device body, asample surface unit can be attached to the device after thesample-mask-unit slightly moving mechanism 4 is removed from the device.Performing the flat surface milling with the sample surface unit beingplaced minimizes the milling processing other than the sample and almosteliminates damaging of the sample unit.

Moreover, placing an optical microscope 57, as in FIG. 17, on the upperportion of the processing observation window of the ion milling deviceillustrated in FIG. 10 and the like allows the progress of the millingprocessing to be checked. This makes it possible terminate theprocessing and to take out the sample when the processing is completedup to a desired processing range, and thereby contributes to animprovement in throughput.

Furthermore, an electron microscope 58 may be placed as illustrated inFIG. 18 in place of the optical microscope 57 illustrated in FIG. 17.The electron microscope 58 is used for checking the progress of theprocessing during performing the milling processing on the sample withthe ion beam. The method of using the electron microscope 58 is totemporarily stop the milling processing, open the shutter forcontamination prevention, and then perform observation using theelectron microscope 58. When a desired processing range has not beenobtained yet, the electron beam irradiation is terminated, the shutterfor contamination prevention is closed, and then, the milling processingis started again by irradiation with the ion beam. When a desiredprocessing range has been obtained, the magnification is increased to arequired level and a required image is captured.

The device is configured such that sample-mask-unit slightly movingmechanism 4 or the sample surface unit is removed from the device, thesample is mounted on a sample unit for the electron microscope, andthen, the sample unit is attached to the device. In this way, the devicecan be used as a normal electron microscope as well.

According to the ion milling device illustrated in the embodiment, it ispossible to obtain an ion milling device in which the processingobservation window 7, the ion source 1, and the sample stage 8 areplaced on the upper surface, the left side surface (or the right sidesurface), and the front surface of the vacuum chamber 15, respectively.This facilitates both of the placement and the observation of theprocessed surface observation device. Furthermore, this makes itpossible to perform both of the cross-section milling and the flatsurface milling with the single device.

Recently, it has increasingly become important to perform thecross-sectional observation on a composite material with an electronmicroscope, particularly in the field of semiconductor devices. Alongwith this, an increasing importance is placed on the mirror-polishing ofa cross section of a composite material. This embodiment makes itpossible to perform both of the cross-section milling and the flatsurface milling with a single device. Furthermore, placing anobservation device on an upper portion of a vacuum chamber significantlyimproves the operability.

Although the above description has been made regarding the embodiments,the present invention is not limited to these embodiments, and it isapparent to those skilled in the art that various changes andmodifications may be made within the spirit of the present invention andthe scope of the attached claims.

REFERENCE SIGNS LIST

-   1 ion source-   2 mask-   3 sample-   4 sample-mask-unit slightly moving mechanism-   5 sample unit base-   6 vacuum exhaust system-   7 processing observation window-   8 sample stage-   9 rotor-   10 flange-   11, 24 linear guide-   12 magnifying lens-   13 magnifying-lens slightly moving mechanism-   15 vacuum chamber-   21 sample-mask unit-   22 sample-holder rotary ring-   23 sample holder-   25 mask holder-   26 mask finely adjusting mechanism-   27 mask fixing screw-   28 sample-holder rotary screw-   30 sample-holder-position controlling mechanism-   35 sample-holder fixing metal fitting-   40, 57 optical microscope-   41 observation table-   42 fixation table-   50 gear-   51 bearing-   52 mask unit fixation part-   53 shaft coupling-   54 linear motion device-   55 motor-   56 sample surface unit-   58 electron microscope-   60 sample-stage pulling out mechanism

1. An ion milling device including: a vacuum chamber; an ion source foremitting an ion beam; a tilt stage disposed inside the vacuum chamberand having a tilt axis parallel with a first axis orthogonal to the ionbeam; a support table disposed on the tilt stage; a sample holdingmember attached to the support table for holding a sample to perform asurface milling to process a surface of the sample such that a surfaceof the sample is parallel with the support table, and to perform a crosssection milling to process an edge of the sample such that the surfaceof the sample is perpendicular to the support table; a drive mechanismfor rotating or swinging the support table with respect to a rotationaxis which is parallel with a second axis orthogonal to the first axisand is parallel with a normal direction of a sample placing surface ofthe support table, wherein the ion milling device is configured suchthat the cross section milling to the sample is performed before thesurface milling to the sample; in the surface milling, the ion beam isirradiated while the tilt stage is tilted with respect to the ion beamand the support table is rotated or swung with respect to the rotationaxis, with the surface of the sample being parallel with the supporttable; and in the cross section milling, the ion beam is irradiatedwhile the tilt stage is not tilted with respect to the ion beam and thesupport table is swung with respect to the rotation axis, with a surfaceof the sample being perpendicular to the support table.
 2. The ionmilling device according to claim 1, further comprising a unit fordetermining, by a sensor, which one of the first sample holding memberor the second sample holding member is attached to the support table. 3.The ion milling device according to claim 2, further comprising: a unitfor switching, based on a determination result by the sensor, theperforming the surface milling and the performing the cross sectionmilling.
 4. The ion milling device according to claim 1, furthercomprising: a unit for switching, through an operation of a controldevice, the performing the surface milling and the performing the crosssection milling.
 5. The ion milling device according to claim 4, whereinthe switching is performed depending on a distance between the ionsource and the sample.
 6. The ion milling device according to claim 1,further comprising: a mechanism for displacing a center of a position ofthe sample on the support table.
 7. The ion milling device according toclaim 1, further comprising: a mechanism for displacing an axis of theion beam and the rotation axis of the support table from each other. 8.The ion milling device according to claim 1, further comprising: a partfor partially blocking the ion beam in the cross section milling.
 9. Theion milling device according to claim 1, wherein the vacuum chamber isprovided with an observation window.
 10. The ion milling deviceaccording to claim 9, wherein the observation window is provided in aceiling surface of the vacuum chamber.
 11. The ion milling deviceaccording to claim 10, wherein the ion source is placed in a surfacedifferent from the ceiling surface of the vacuum chamber.
 12. The ionmilling device according to claim 11, wherein a shutter movable to aspace between an ion beam irradiation position for the sample and theobservation window is provided.
 13. The ion milling device according toclaim 1, wherein the vacuum chamber is provided with an opticalmicroscope or electron microscope.
 14. The ion milling device accordingto claim 13, wherein the optical microscope or electron microscope isprovided in a ceiling surface of the vacuum chamber.
 15. The ion millingdevice according to claim 14, wherein the ion source is placed in asurface different from the ceiling surface of the vacuum chamber. 16.The ion milling device according to claim 1, comprising: the sampleholding member including a first sample holding member and a secondsample holding member, each of the first and second sample holdingmembers being configured to be attachable to and detachable from thesupport table, wherein: the surface milling is performed on the surfaceof the sample held by the first sample holding member attached to thesupport table such that a surface of the sample is parallel with thesupport table, and the cross section milling is performed on the edge ofthe sample held by the second sample holding member attached to thesupport table such that the surface of the sample is perpendicular tothe support table.